Semiconductor wafer manufacturing requires precise, reliable equipment to exhaust air from the process chamber and then restore it back to atmospheric pressure. SMC’s angle and inline valves play an important role in this process. These valves, which include the XL, XM and XY Series, are also suitable for any industrial application that involves high vacuum and process gasses. In addition to semiconductor manufacturing, common industries include solar, food production and pharmaceutical manufacturing. 

Here’s a quick overview of the XL, XM and XY Series:

The XL Series Aluminum Valves

These aluminum high vacuum angle valves offer excellent thermal conductivity, creating a uniform temperature for the entire valve body and decreasing gas condensation inside the valve. Units don’t contain any nickel, chrome or other metals, and their low sputtering yield minimizes heavy metal contamination of semiconductor wafers.

XL valves come in many variants, which include options like:

• Single- and double-acting.
• Air-operated with a solenoid valve.
• A bellows seal over the shaft and spring.
• One-touch connection and release option.
• Optional 100° to 150°C heaters.
• Many flange sizes.
• O-ring shaft seals.
• Electromagnetic types.

To learn more about XL Series valves, visit SMC’s website.

XM and XY Stainless Steel Valves

XM Series angle valves and XY Series inline valves feature a rugged, stainless steel body. XM valves are interchangeable with XL Series valves. Thanks to their precision-cast, one-piece manufacturing process, XY valves prevent imperfections due to gas accumulation, ensuring there is no porosity in the body. These lightweight and compact units also offer more than 2 million cycles of service life.

To learn more about XM and XY Series valves, visit SMC’s website.